Used Canon FPA-6400ES6a for sale

The Canon FPA-6400ES6a, released by Canon in December 2026, is a new-generation KrF scanning lithography system designed for the production of memory and logic chips. It represents a significant update to Canon’s KrF scanning platform—the first in many years. Its core strategy is to push both throughput and overlay accuracy to new heights for the KrF platform, while remaining within the established DUV process node.

Key Performance: Utilizing a 248nm KrF light source, the system achieves a throughput of 400 wafers (300mm) per hour (based on 96 exposure fields)—a substantial improvement over its predecessor, the FPA-6300ES6a. With a nominal overlay accuracy of 4.0nm, Canon claims this is an industry-leading specification for 300mm KrF scanners. This figure is on par with high-end KrF systems from ASML; however, it should be noted that the specific measurement criteria for this 4.0nm specification (whether for a single machine or machine-to-machine matching) have not yet been disclosed.

Key Technologies: A newly developed, ultra-high-acceleration stage reduces drive time, while vibration-suppression technology and thermal control of the optical path ensure consistent precision during high-speed operation. An optional "Hi-ALS" alignment light source allows for the selection of specific alignment wavelengths based on the material and process, enhancing alignment stability across a diverse range of manufacturing steps. Wafer-warp tolerance has been extended to 700μm to address the increasing deformation challenges associated with 3D stacking and wafer-bonding processes. Furthermore, the system incorporates regenerative power recovery and an energy-efficient power supply design to reduce energy consumption per wafer.

Market Positioning: Rather than targeting the most advanced process nodes, this system is designed to meet the critical demand for high throughput and high yield in the mature process layers used for AI-driven memory and logic chip production. It aims to capture the high-end KrF market by offering superior throughput and overlay accuracy.