Used PROMETRIX RS50

The PROMETRIX RS50 is a non-contact sheet resistance and resistivity measurement system, serving as a core Metrology & Inspection (M&I) tool in semiconductor front-end manufacturing.

Primary Function: Non-contact electrical characterization of thin films

This system is designed for the precise measurement of sheet resistance and resistivity in doped layers (such as those created via ion implantation or diffusion) and metal/conductive thin films on wafer surfaces. It is a critical instrument for verifying the accuracy of ion implantation doses, ensuring the effectiveness of annealing processes, and confirming the electrical conductivity of metal thin films.

Key Technical Features

Non-contact Eddy Current Measurement: Utilizing high-frequency eddy current induction, the measurement probe operates without any physical contact with the wafer surface. This eliminates the risk of scratching or particle contamination, ensuring full compliance with the stringent cleanliness requirements of semiconductor fabrication facilities (Fabs).

Fully Automated Mapping and High Throughput: Equipped with an automated wafer handling system (compatible with FOUPs), the tool supports multi-point, fully automated scanning. It rapidly generates a comprehensive sheet resistance map (Wafer Map) of the entire wafer, providing an intuitive visualization of process uniformity.

No Dedicated Test Structures Required: Unlike traditional four-point probe testing, eddy current technology does not require specialized test pads on the wafer. Measurements can be performed directly on any bare wafer or processed wafer, making it highly suitable for both process R&D and real-time production line monitoring.

Summary

With its non-destructive eddy current measurement technology and efficient, automated mapping capabilities, the PROMETRIX RS50 serves as an essential M&I tool for monitoring doping profiles and thin-film electrical properties, thereby ensuring process consistency in semiconductor manufacturing.