Used ASM A400™ DUO Dual Reactor Vertical Furnace System

The ASM A400™ DUO is a dual-reactor vertical furnace system designed for 200mm and smaller wafers, primarily serving the specialty process market—including power devices, analog chips, RF components, and MEMS.

Core Positioning: A High-Throughput, Dual-Reactor Platform for Specialty Processes

The system’s core design features a dual-reactor configuration. The two reactors operate independently, maximizing throughput while minimizing cleanroom footprint. It also supports "sequential batch processing," where wafers can be transferred from the first reactor to the second for subsequent processing steps within a controlled, oxygen-free environment.

Key Features

Continuous Dual-Boat Operation: A second boat of wafers is kept in a standby state, allowing for an immediate switchover once the first batch is completed—significantly increasing reactor utilization.

Comprehensive Process Coverage: Supports atmospheric pressure processes—such as diffusion, annealing, oxidation, and various high/low-temperature treatments—as well as LPCVD applications for materials like polysilicon, silicon nitride, and TEOS.

Compatibility and Flexibility: Fully compatible with original A400 process recipes, facilitating seamless production line upgrades. It can also be configured to handle two different wafer sizes simultaneously, making it an ideal choice for fabs transitioning to larger wafer diameters.

Summary

With its dual-reactor architecture and high-throughput dual-boat operation, combined with comprehensive support for power, RF, and MEMS specialty processes, the A400 DUO serves as a primary vertical furnace platform for 200mm production lines, balancing high capacity with process flexibility.