Used Panasonic PSX307

The Panasonic PSX307 is a fully automated, in-line vacuum plasma cleaning system designed for continuous mass production in sectors such as semiconductor packaging, electronic assembly, and automotive electronics.

Core Positioning: In-line Continuous Mass Production

Unlike batch-type chamber plasma systems, the PSX307 utilizes an in-line conveyor transport architecture. It can be integrated directly into a customer’s automated production line, enabling continuous plasma treatment of products as they move along the line. This eliminates the need for manual loading, significantly improving production throughput and process consistency.

Key Processes and Features

High-Uniformity Treatment: The chamber features an optimized design for both gas flow and electrodes—tailored for conveyor-based transport—ensuring uniform plasma cleaning and activation across the surfaces of substrates (such as lead frames, circuit boards, or strips) as they pass through.

Flexible Process Gases: The system is compatible with various process gases, including Argon (Ar), Oxygen (O₂), Hydrogen (H₂), and fluorine-containing gases. It supports both direct and downstream plasma modes, addressing diverse requirements such as oxide removal, the elimination of organic contaminants, and the enhancement of surface energy.

Automation Integration: The system offers seamless connectivity with upstream and downstream transport tracks and includes robust communication interfaces. It can be integrated into a factory’s Manufacturing Execution System (MES) to facilitate high-standard automated production.

Summary

With its in-line continuous transport capability and high-uniformity plasma treatment, the PSX307 serves as a critical piece of equipment for enhancing yield and throughput in semiconductor back-end packaging (e.g., prior to wire bonding or molding) and automotive electronics mass production. It is perfectly aligned with the requirements of fully automated factory production.