Used PVA TePla TECHNICS 300 Semi-Auto Plasma Etching and Surface Treatment System

The PVA TePla TECHNICS 300 Semi-Auto is a semi-automated plasma etching and surface treatment system designed specifically for R&D and small-batch, high-mix production in the fields of semiconductors, microelectronics, and advanced packaging.

Core Positioning: A Flexible, Semi-Automated R&D Platform

The "Semi-Auto" designation indicates an operational mode featuring manual loading and unloading, with the actual process sequence executed automatically. This design balances equipment cost-effectiveness with a high degree of flexibility for process engineers, making it an ideal choice for new process development, experimental validation, and production lines that require significant operational adaptability.

Key Technical Features

Dual-Mode Plasma Source: Typically supports both "downstream" and "direct" plasma modes. The downstream mode is gentle—eliminating ion bombardment and electrostatic damage—making it suitable for delicate compound semiconductors or packaged devices. The direct mode offers higher etch rates, ideal for photoresist stripping (ashing), surface activation, and fine-feature etching.

Versatile Process Gas Compatibility: Compatible with a wide range of process gases, including O₂, Ar, CF₄, and SF₆. It can perform tasks such as photoresist removal (ashing), organic contaminant cleaning, surface modification, and isotropic etching of materials like silicon and silicon nitride.

Semi-Automated Operation and Safety-Compliant Chamber: Equipped with semi-automated wafer transfer or manual loading capabilities, the system incorporates robust safety interlocks, exhaust gas treatment, and vacuum control. It meets SEMI standards, ensuring the safety of both operators and the equipment itself.

Summary

With its flexible process compatibility, gentle plasma treatment capabilities, and the high degree of operational freedom provided by its semi-automated design, the TECHNICS 300 Semi-Auto serves as an ideal plasma etching and surface treatment solution for R&D laboratories and small-batch, specialized production lines.