Panasonic PSX307A for sale
Product Detail
The Panasonic PSX307A is a high-performance, in-line vacuum plasma cleaning system designed for semiconductor back-end processing and electronic assembly. It specifically addresses the challenges of maintaining process stability and controlling micro-contamination within high-volume production environments.
Core Positioning: Precision Processing for Mass Production
As an upgraded model in the PSX307 series, the PSX307A retains an in-line, continuous-production architecture while incorporating optimizations to its plasma generation and gas distribution systems. It is engineered for workpieces that require continuous transport—such as lead frames and substrates—enabling high-standard surface activation and the removal of micro-contaminants without disrupting the production line’s takt time.
Key Technical Features
Highly Efficient and Uniform Plasma Field: The chamber and electrode structures have been redesigned to enhance the density uniformity of the plasma across the surface of moving substrates, effectively preventing localized bonding failures caused by uneven treatment.
Precise Process Control: The system supports the accurate mixing of various process gases (e.g., Ar, O₂, H₂) and utilizes pulsed RF output. This capability not only removes organic residues but also selectively reduces oxide layers on metal surfaces, all while remaining gentle on sensitive components.
Seamless Production Line Integration: Equipped with comprehensive SMEMA interfaces and SECS/GEM communication protocols, the system can be directly integrated into fully automated MES (Manufacturing Execution System) environments. This facilitates the automatic deployment of process recipes and real-time traceability of process data, ensuring exceptional consistency between production batches.
Summary
By offering optimized plasma uniformity and highly automated in-line integration, the PSX307A provides a stable and efficient dry-cleaning solution for advanced packaging applications—such as those preceding wire bonding or encapsulation—as well as for automotive electronics production lines.











