Used Nordson MARCH AP-600

The Nordson MARCH AP-600 is a benchtop, batch-mode vacuum plasma processing system designed for surface cleaning and activation in semiconductor packaging, microelectronics, and medical device manufacturing.

Core Positioning and Process

The primary value of this system lies in its ability to perform uniform, dry, batch-mode processing. Prior to wire bonding, encapsulation, or coating, it utilizes RF (radio frequency) plasma to remove organic contaminants and microscopic residues from substrate surfaces, thereby significantly increasing surface energy and enhancing adhesion for subsequent processes. The system supports both direct and downstream plasma modes; the latter is gentler, making it ideal for sensitive components by preventing ion bombardment and electrostatic damage.

Key Configurations

Equipped with a 13.56 MHz RF generator (600W standard) and an automatic matching network, the system ensures high process repeatability. Its aluminum chamber can accommodate up to seven electrode shelves, supporting a wide range of magazines and trays. It is compatible with various gases—including argon, oxygen, hydrogen, and fluorine-containing gases—and comes standard with two mass flow controllers (expandable up to four).

Summary

With its compact benchtop footprint and reliable batch-processing capabilities, the AP-600 serves as an excellent solution for pre-packaging cleaning and pre-bonding activation, offering an optimal balance between process performance and production-floor space efficiency.