Used KE DD-7460 Horizontal Diffusion Furnace

The KE DD-7460 is a horizontal diffusion furnace from Kokusai Electric, primarily used for high-temperature heat treatment processes such as oxidation, diffusion, and annealing of semiconductor wafers.

Core Positioning: This equipment features a horizontal furnace tube architecture, handling batch heat treatment tasks in mature and specialty process production lines. Its design focuses on temperature uniformity and process repeatability at high temperatures, making it suitable for the manufacturing of power devices, MCUs, and other products.

Key Technical Features: Wide Temperature Range and High-Precision Temperature Control: Supports a process range of 200–1300℃, with a high-temperature isothermal accuracy of ±0.5℃ and a low-temperature range of approximately ±1℃, ensuring consistency in oxidation and diffusion processes.

Multi-Gas Source Configuration: Equipped with multiple independent gas source controls, supporting precise proportions of O₂, N₂, and dopant gases (such as phosphine and borane), with high flow accuracy.

Wafer Compatibility: Its modular design allows for adaptation to different wafer sizes and a wide range of process node diameters, supporting process nodes above 90nm for 8-inch wafers.

Summary: The DD-7460, with its horizontal furnace tube's batch processing capabilities and stable temperature control, is a reliable heat treatment device for oxidation, diffusion, and annealing processes in mature production lines.