Used ADVANTEST M&I Equipment T6535

The Advantest T6535 is a fully automated wafer prober designed for 200mm (8-inch) wafers. It is a classic piece of test equipment from the Mechatronics & Instruments (M&I) division of Advantest.

Core Positioning: An Efficient Test Platform for Mature Process Technologies

During the wafer testing phase, this system precisely aligns and contacts the pads on the chips—located on the wafer—with the probe card of the test equipment to perform electrical performance testing. It is primarily used in production lines for logic chips, analog/mixed-signal chips, power semiconductors, and MEMS devices manufactured using mature process technologies.

Key Technical Features

High-Precision Alignment and Temperature Control: Equipped with a sophisticated wafer positioning and automatic alignment system, it ensures precise contact between the probes and the chip pads. It supports active temperature control (typically covering a range from -40°C to +150°C or higher) to meet various testing temperature requirements.

High Throughput and Automation: It comes standard with a fully automated wafer handling system (compatible with industry-standard wafer cassettes), offering high test throughput and multi-site parallel testing capabilities. It also supports SECS/GEM communication, allowing for seamless integration into automated test production lines.

Flexible Probe Card Compatibility: It supports various probe card interfaces (such as cantilever and vertical types) to accommodate diverse testing needs.

Summary

With its high-precision alignment, stable temperature control, and high-throughput automation capabilities, the T6535 serves as a core piece of equipment for wafer-level electrical performance testing in 200mm production lines utilizing mature process technologies.