Used Nordson MARCH AP-1000™ Plasma Cleaner

The Nordson MARCH AP-1000™ is a high-capacity, batch-type vacuum plasma processing system designed to meet the demands of large-scale mass production in sectors such as semiconductor packaging, microelectronics, and medical device manufacturing.

Core Positioning: High-Throughput Mass Production

As a model with a larger chamber capacity within the AP series, the AP-1000™ is primarily engineered to address surface cleaning and activation challenges in high-volume production environments. It can process a greater number of substrates, magazines, or trays in a single cycle, significantly increasing production line throughput.

Key Processes and Configuration

Large-Area Uniform Processing: Equipped with a spacious aluminum vacuum chamber and multi-level adjustable electrode shelves (capable of accommodating a high number of layers), the system ensures highly uniform plasma distribution during batch processing, guaranteeing consistency from batch to batch.

RF and Gas Control: Features a stable 13.56 MHz RF generator paired with an automatic impedance matching network. It supports the integration and precise control of multiple process gases (such as O₂, Ar, H₂, CF₄, etc.) and offers flexible switching between direct and downstream plasma modes—ideal for the gentle treatment of sensitive components.

Automation and Integration: Designed for integration with automated loading/unloading systems and compliant with factory automation standards (SECS/GEM), it is well-suited for modern, continuous mass-production lines.

Summary

With its exceptionally large capacity, uniform and stable plasma processing capabilities, and high level of automation compatibility, the AP-1000™ serves as a core piece of equipment for advanced packaging applications (such as cleaning prior to wire bonding or encapsulation) and the large-scale surface modification of medical devices.