Thin Flim Deposition Equipment
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Used ASM Eagle 10 Plasma-Enhanced Chemical Vapor Deposition System
The ASM Eagle 10 (note the spelling: "Eagle," not "Eagla") is a single-wafer plasma-enhanced chemical vapor deposition (PECVD) system
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Used ASM Dragon 2300 Thin Flim Deposition Equipment
The ASM Dragon 2300 is a plasma-enhanced chemical vapor deposition (PECVD) system
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