SCREEM Wafer Cleaner SB-3300 for sale

The SB-3300, launched by SCREEN in 2020, is the industry’s first hybrid wafer backside cleaning system. Unlike the frontside cleaning tools you previously inquired about—such as the CW-2000 or FC-3100—the SB-3300 specializes in removing particles from the backside of wafers. Its primary objective is to address defocusing issues in advanced lithography caused by the presence of particles on the wafer’s backside.

Key Innovation: Simultaneous Chemical and Physical Cleaning. The SB-3300 is the first system in the industry to integrate chemical etching/cleaning with physical scrubbing within a single chamber. By performing both processes concurrently, it achieves highly efficient removal of backside particles. Utilizing a proprietary SCREEN chuck system, the tool prevents chemical solutions from seeping onto the device side of the wafer while also minimizing etching residues at the wafer edge.

Throughput and Design: The system features a space-saving, four-tier stacked tower design—identical to that of the flagship SU-3300 model—and is equipped with 16 processing chambers. It delivers an industry-leading throughput of 700 wafers per hour, a figure that accounts for the entire backside cleaning process, including wafer flipping. Furthermore, precise nozzle control ensures uniform etching, which helps to mitigate wafer warpage.

In short, the SB-3300 is a dedicated, high-volume production platform from SCREEN designed specifically for backside cleaning in advanced manufacturing processes, serving as a complementary technology to frontside cleaning equipment.