Used SEMES BLUEICE SPM

The EMES BLUEICE SPM is a fully automated, single-wafer wet cleaning system designed for 300mm wafers. The "SPM" in its name refers to its core process—cleaning with a Sulfuric Peroxide Mixture—which is specialized for the removal of stubborn photoresist and organic contaminants in advanced manufacturing nodes.

Core Focus: High-Intensity Photoresist Removal and Organic Cleaning

The SPM process leverages the strong oxidizing and dehydrating properties of high-temperature sulfuric acid to rapidly decompose and strip away persistent photoresist polymers—residues often left behind after ion implantation, etching, or metal lift-off processes. By precisely controlling the chemical mixture ratio and temperature (typically above 100°C), the BLUEICE SPM ensures a high removal rate while minimizing damage to the underlying materials.

Key Technical Features

Precise Control of High-Temperature Chemicals: The SPM process is highly sensitive to temperature and mixing ratios. The system employs sophisticated temperature control and chemical delivery mechanisms to maintain stable chemical activity, preventing uneven cleaning or the accumulation of byproducts caused by premature decomposition.

Single-Wafer Rotation and Prevention of Cross-Contamination: Wafers are rotated at high speeds on a chuck, ensuring uniform coverage of the chemical solution. Single-wafer processing eliminates the risk of cross-contamination inherent in batch (tank-based) cleaning and allows for precise control over reaction times—a necessity for cleaning ultra-fine, complex patterns.

Reliability in Highly Corrosive Environments: Given the highly corrosive nature of the SPM chemistry, the process chamber, piping, and drainage systems are constructed from materials with exceptional corrosion resistance. The system also includes comprehensive exhaust and waste-liquid treatment solutions to ensure long-term operational stability and safety.

Full Automation Integration: Equipped with standard FOUP loading/unloading capabilities and SECS/GEM communication protocols, the system integrates seamlessly into 300mm automated production lines, meeting requirements for high throughput and data traceability.

Summary

Centered on the high-temperature SPM process, the BLUEICE SPM is designed to tackle demanding photoresist removal and organic cleaning challenges in the production of advanced logic, memory, and sophisticated packaging. It serves as a critical wet-processing tool for maintaining pattern integrity and ensuring high product yields.