Used CREEM Wafer Cleaner SS-3200 for sale

This is a 200mm single-wafer spin scrubber. Rather than being a simple upgrade to the previous SS-80EX model, it adapts the mature platform of the 300mm flagship SS-3200, re-optimizing it for the 200mm format.

The core improvement lies in throughput: it achieves a maximum processing capacity of 500 wafers per hour—more than triple that of its predecessor, the SS-80EX. According to the manufacturer, this performance level ranks at the top of the industry for 200mm spin scrubbers. This is achieved by leveraging the architecture of the SS-3200—featuring an 8-chamber (4-level × 2-tower) stacked configuration combined with a high-speed, multi-arm wafer handling system—rather than simply increasing the rotation speed.

Process and Environmental Impact: The system utilizes a dual-brush arm design, allowing for the simultaneous use of different brush types, such as those for the wafer surface and the beveled edge. Pure water consumption per chamber is reduced by approximately 15% compared to the SS-80EX, addressing the concerns of 200mm power device production lines regarding energy and water usage.

Maintenance and Expandability: The spin chambers feature a slide-out design, and the wafer-handling area is easily accessible, significantly improving ease of maintenance. A hot plate option is available, which is useful for drying 3D structures such as those found in MEMS devices. The system is specifically targeted at power devices—including automotive and power control chips for electric vehicles (EVs) and autonomous driving systems—which are currently the primary drivers of the 200mm market.

In short, this 200mm version of the SS-3200 represents SCREEN’s strategy of bringing its 300mm flagship platform down to the 200mm power device cleaning segment. Its key selling points are a threefold increase in throughput over the previous generation and lower pure water consumption; it serves as a generational replacement for the SS-80EX you previously inquired about.