Used SCREEM WS-820L

The WS-820L is a carrierless, batch-type wet cleaning system from SCREEN, designed for 200mm wafers.

Key difference from the WS-820C: While the WS-820C utilizes a carrier-based transport system—where wafers are moved collectively within a cassette—the WS-820L employs a carrierless transport method. By eliminating the carrier, the system theoretically reduces the risk of particle contamination originating from the carrier itself and streamlines the wafer-handling process. Both models are designed for 200mm wafers, but the WS-820L follows a more "direct" transport approach.

Core capabilities and shared series features: The system offers a flexible configuration for process tanks; the official English product page specifies a maximum of 16 tanks, while some Chinese-language materials and earlier documentation mention 13 tanks. To ensure high throughput, the system can be equipped with up to 6 transport robots. For the drying stage, it supports the integration of a reduced-pressure drying unit to suppress watermarks—a feature explicitly listed as available for the WS-820L.

Market positioning: Within the category of batch-type wet cleaning systems, the WS-820L serves as a flexibly configurable model for 200mm production lines. It is well-suited for applications where sensitivity to carrier-induced contamination is a concern or where there is a need to simplify wafer-handling workflows. Together with the WS-820C, it provides a complementary choice between carrier-based and carrierless processing.