Used SCREEM SS-3300S

Launched by SCREEN in December 2020, the SS-3300S is a single-wafer spin-cleaning system designed for 300mm wafers. As an evolution of the SS-3200 series, its primary advantage lies in its industry-leading throughput.

Throughput Breakthrough: The system achieves a maximum processing capacity of 1,000 wafers per hour—an increase of approximately 25% over conventional models. This performance is driven by a new platform architecture that, for the first time in a cleaning system, accommodates up to 16 process chambers. Combined with an innovative dual-transfer system, this design significantly boosts output efficiency relative to the system's footprint.

Relationship to the SS-3200: With over 500 units shipped globally, the SS-3200 has become the de facto industry standard. The SS-3300S inherits the proven process stability of its predecessor, allowing customers to seamlessly transition existing process recipes without the need for re-validation.

Space Optimization and Intelligence: Compared to two 8-chamber SS-3200 units, the new model reduces the required footprint by 27%. Its control system has been comprehensively upgraded to support IoT integration and inter-tool coordination, meeting the requirements of "smart factories." Furthermore, an optional exhaust circulation system can reduce total exhaust volume by 65%, helping to satisfy ESG (Environmental, Social, and Governance) criteria.

In short, the SS-3300S serves as a flagship platform for SCREEN. By increasing the number of process chambers and accelerating wafer handling, it elevates single-wafer cleaning throughput to the 1,000-wafer-per-hour threshold. This creates a clear distinction from the 200mm-wafer-focused SS-3200 (which has a capacity of 500 wafers per hour), establishing a well-defined product positioning between the 300mm and 200mm offerings.