NIKON Lithography Machine NSR2205i10C for sale

The Nikon NSR-2205i10C is a fully automated stepper (step-and-repeat lithography system) designed for 200mm (8-inch) wafers. Part of Nikon’s classic NSR 2200 series, it utilizes an i-line (365nm) light source.

Core Positioning: A Workhorse for Advanced Mature-Node and Specialty Processes

As an evolution of the 2205i9C model (the "10" in the designation typically denotes a higher numerical aperture or an optimized optical configuration), this system is primarily used for mature-node processes at 0.35μm and below. While retaining the i-line source’s excellent penetration capability for thick photoresists, it offers enhanced resolution, making it widely applicable in the production of power semiconductors (such as IGBTs and MOSFETs), analog/mixed-signal chips, MEMS, and advanced packaging.

Key Technical Features

High-Numerical-Aperture (NA) Optical System: Equipped with an optimized 5x reduction projection lens, this system features a higher numerical aperture than the i9C. It achieves finer, sub-micron resolution while maintaining a substantial depth of focus—essential for handling thick photoresists and warped wafers—thereby meeting more demanding patterning requirements.

Advanced Alignment and Overlay Control: The system incorporates Nikon’s proven LSA (Laser Step Alignment) and FIA (Field Image Alignment) technologies. It provides high-contrast alignment signals even when dealing with complex substrates—such as those with thick photoresists or metal layers, common in packaging and specialty processes—ensuring superior overlay accuracy between layers.

High Productivity and Mature Platform: Featuring a standard fully automated wafer-handling system, the unit delivers high throughput. It supports SECS/GEM communication, allowing for seamless integration into 200mm automated mass-production lines. The NSR 2200 platform boasts a large installed base across the industry, with well-established process recipes and relatively low maintenance costs. Summary

With its superior optical resolution, stable and high-precision alignment capabilities, and a proven, mature production platform, the NSR-2205i10C stands out as a highly competitive core lithography tool for 200mm mature-node manufacturing, power device production, and advanced packaging lines.