Electroglas EG2001X

The EG Probe Station 2001X (commonly designated as the Electroglas EG2001X) is a classic, fully automated wafer probe station manufactured by Electroglas. It serves a critical role in on-wafer semiconductor testing by handling the automated loading, alignment, and probing of wafers. As an older model—typically produced between 1984 and 1996—it remains in circulation within the secondary equipment market, frequently appearing in research institutions or as refurbished units deployed in established production lines.

Core Positioning and Processing Capabilities

The EG2001X is designed to process 150 mm (6-inch) wafers as standard. It is compatible with substrates such as silicon, glass, and polyimide-coated glass; with optional configurations, it can also support materials like stainless steel or aluminum oxide-coated PEN. Certain unit configurations can accommodate a range of wafer sizes from 75 mm to 150 mm. The system supports both fully automated and manual operation modes: in automatic mode, it handles wafer loading, alignment, multi-point probing, and sorting; in manual mode, users can place a wafer or a wafer fragment onto the chuck and use a microscope to guide the probe-to-pad contact process.

Automation and Optional Features

The probe station utilizes a modular design, with core automated functions including wafer loading, alignment, measurement, and testing/sorting. Common options include an "Autoalign" system, automated wafer handling (loaders), thermal chucks with controllers, ink-dot detection, Optical Character Recognition (OCR), probe-mark inspection, and non-contact edge sensors. Some units found on the secondary market are equipped with Temptronic temperature-controlled chucks, offering a temperature range from -10°C to 130°C.