Used Canon FPA-3000 Fully Automatic Stepper

The Canon FPA-3000 i4 is a fully automated stepper designed for 200mm (8-inch) and smaller wafers. Part of Canon’s classic FPA-3000 platform, it utilizes an i-line (365nm) light source.

Core Positioning: A Classic, High-Volume Production Tool for Mature Process Nodes

As a representative lithography system from the 200mm era, the FPA-3000 i4 is primarily used in production lines for mature process nodes and specialty technologies. Through a step-and-repeat exposure process, it precisely patterns micron-scale features onto wafers, making it widely applicable in fields such as power devices (IGBTs, MOSFETs), analog chips, MEMS, and advanced packaging.

Key Technical Features

i-line Light Source and High-Precision Alignment: Equipped with a 365nm mercury-lamp light source and Canon’s proven alignment system, it achieves high-precision layer-to-layer overlay, meeting the requirements for mass production at resolution nodes of 0.35μm and above.

High Throughput and Automation: Featuring a standard automated wafer-handling system, the unit delivers high throughput and supports SECS/GEM communication, allowing for seamless integration into automated 200mm production lines.

Process Stability and Low Cost of Ownership: With a large installed base and a mature process ecosystem, this platform offers high operational stability and relatively low maintenance costs, making it a cost-effective choice for established wafer fabs.

Summary

The Canon FPA-3000 i4 is a classic, high-volume production tool for 200mm lithography. Renowned for its stable exposure precision, high throughput, and mature process support, it continues to provide reliable lithography solutions for production lines focused on mature process nodes and specialty technologies.