Used ASML Lithography Machine XT 1900Gi

The ASML XT:1900Gi is a fully automated step-and-scan lithography system (scanner) designed for 300mm (12-inch) wafers. Part of ASML’s classic XT platform, it utilizes an i-line (365nm) light source.

Core Positioning: A Workhorse for Advanced Packaging and Thick-Resist Processes

This model is a mature, high-end version within the XT series, optimized specifically for i-line lithography. It is primarily used in advanced packaging applications—such as Fan-Out, 2.5D/3D integration, and Flip-Chip—as well as in MEMS manufacturing. The i-line source’s strong penetration capability in thick photoresists makes it exceptionally well-suited for creating features with significant thickness, such as redistribution layers (RDL) and micro-bumps.

Key Technical Features

Optimized Optics and Depth of Focus (DOF) Control: Equipped with a high-performance i-line lens, the system provides an ample depth of focus. This ensures high-fidelity exposure even through thick photoresist layers (tens of microns), preventing sidewall slope and guaranteeing the reliability of the packaging process.

High-Precision Alignment and Warpage Handling: To address the common challenges of wafer warpage and surface topography variations in packaging, the system features advanced alignment and dynamic leveling capabilities, ensuring excellent overlay accuracy even on non-planar surfaces.

High Throughput and Mature Platform: The system comes standard with fully automated 300mm FOUP (Front Opening Unified Pod) handling, delivering outstanding throughput. It supports SECS/GEM communication, allowing for seamless integration into automated production lines. The large installed base of the XT platform ensures low maintenance costs and a mature process ecosystem.

Summary

With its superior performance in exposing thick photoresists, precise warpage compensation, and high throughput, the XT:1900Gi serves as a core lithography tool for ensuring patterning yields in 300mm advanced packaging and mature-node manufacturing lines.