Used ASM XP8® Synergis® for sale

The ASM XP8® Synergis® is a high-throughput 300mm thermal ALD platform designed by ASM for the mass production of advanced logic and memory chips. Its core value proposition lies in integrating the process capabilities—honed through the Pulsar and EmerALD systems—into a multi-chamber XP8 architecture, striking an optimal balance between high throughput and a low cost of ownership.

Architecture and Throughput: Built upon the proven XP8 platform, the Synergis can be configured with up to four dual-chamber modules (DCMs), housing eight independent single-wafer reaction chambers within a compact footprint. This design ensures both high-volume manufacturing efficiency and process independence. Each chamber features a low-volume design combined with precise thermal control, which enhances purge efficiency while delivering excellent film conformality and wafer-to-wafer repeatability.

Process Coverage: The system offers four base configurations, each optimized for specific material types: metal oxides, dielectric films, metal nitrides, and pure metals. Typical applications include etch-stop layers, hard masks, low-resistance ultra-thin barrier layers, and sealing or encapsulation films. Furthermore, the flexible precursor delivery layout enables the deposition of ternary films and complex multi-layer stacks, allowing for fine-tuned control over film properties.

In short, the Synergis serves as a high-volume production workhorse within the XP8 family, focusing on the versatility of thermal ALD—distinctly complementing the PEALD models you previously inquired about by addressing a different segment of the process spectrum.