Used Canon FPA-5500iZ+ Fully Automatic Stepper for sale

The Canon FPA-5500iZ+ is a high-throughput, fully automated stepper designed for 200mm (8-inch) wafers. Utilizing an i-line (365nm) light source, it represents an enhanced model within Canon’s FPA-5500 series.

Core Positioning: A Workhorse for High-Throughput Mature-Node Manufacturing

Engineered for high-volume production in mature-node and specialty-process applications, this system delivers exceptional throughput at the 0.35μm node and above. It is widely used in the production of power semiconductors (such as IGBTs and MOSFETs), analog/mixed-signal chips, MEMS, and advanced packaging, making it a reliable choice for 200mm wafer fabs looking to boost production capacity.

Key Technical Features

High Numerical Aperture and Efficient Exposure: Equipped with a high-numerical-aperture (NA) projection lens and an i-line light source, the system balances resolution with superior throughput (wafers per hour, or WPH) through an optimized optical path and a high-speed stage.

High-Precision Alignment and Overlay: Featuring Canon’s proven high-precision alignment system—optimized for thick-resist processes and warped wafers—the tool ensures excellent inter-layer overlay accuracy and process stability.

Automation and Low Cost of Ownership: The system comes standard with a fully automated wafer-handling system and supports SECS/GEM communication, allowing for seamless integration into automated production lines. With a mature process ecosystem and relatively low maintenance costs, it offers an outstanding price-performance ratio.

Summary

Combining high throughput, high-precision exposure capabilities, and excellent process stability, the FPA-5500iZ+ stands out as a highly competitive core lithography tool for 200mm mature-node and specialty-process production lines.