Used Nikon NSR-2005G8C Fully Automatic Stepper Photolithography System

The Nikon NSR-2005G8C is a fully automated stepper (step-and-repeat lithography system) designed for 200mm (8-inch) wafers. Part of Nikon’s classic NSR 2000 series, it utilizes an i-line (365nm) light source.

Core Positioning: A Mainstay Platform for Mature Process Nodes

This model is primarily utilized in production lines for mature process nodes (0.5μm and above) and specialized semiconductor technologies. Thanks to its stable exposure performance and broad process adaptability, it is widely employed in the high-volume manufacturing of power semiconductors (such as MOSFETs and IGBTs), analog chips, MEMS, and sensors.

Key Technical Features

High-Numerical-Aperture (NA) Optical System: Equipped with a 5x reduction projection lens featuring a numerical aperture (NA) of 0.45. When combined with an i-line light source, it ensures high fidelity for micron-scale patterns while providing a substantial depth of focus—making it ideal for processes involving thick photoresist or wafers with significant surface topography.

High-Precision Alignment and Overlay: The system incorporates Nikon’s proven LSA (Laser Step Alignment) and FIA (Field Image Alignment) technologies. These are optimized for specialized processes—such as those involving wafer bonding or deep-trench structures—to ensure high-precision overlay accuracy between layers.

High Throughput and Low Cost of Ownership: The system comes standard with a fully automated wafer-handling unit and supports SECS/GEM communication protocols. With a large installed base across the industry and a highly mature process ecosystem, it offers excellent availability of spare parts and low maintenance costs, making it a highly cost-effective lithography solution for 200mm production lines.

Summary

With its stable, reliable exposure precision and superior cost-performance ratio, the NSR-2005G8C serves as an indispensable core lithography tool for 200mm production lines focused on mature process nodes and specialized semiconductor technologies.