ASM MS90 yɛ wafer-map-based die sorting system a ɛyɛ adwuma koraa, a wɔayɛ no titiriw ama semiconductor dies no nkyekyɛmu ne nea wɔpaw. Ɛwɔ dual-head pick-and-place arm a linear motors na ɛka no, ɛboa dies a ɛfiri 0.15 mm kɔsi 5 mm square, ɛma standard XY positioning accuracy a ɛyɛ ±38 μm, na ɛtumi yɛ wafers a ne kɛseɛ bɛyɛ 8 inches ho adwuma.
EPM (Electronic Pick Module), a ɛne linear motors ne direct-drive motors ka ho no ma wotumi de XY gyinabea pɛpɛɛpɛ.
