
I-ASM MS90 yinkqubo yokuhlela iidayi esekwe kwimephu ye-wafer ezenzekelayo ngokupheleleyo, eyenzelwe ngokukodwa ukwahlulahlula kunye nokukhetha iidayi ze-semiconductor. Inengalo yokukhetha kunye nendawo enentloko ezimbini eqhutywa ziimoto ezithe nkqo, ixhasa iidayi eziqala kwi-0.15 mm ukuya kwi-5 mm square, inika ukuchaneka okuqhelekileyo kokubeka i-XY kwe-±38 µm, kwaye inokucubungula iidayi ukuya kuthi ga kwi-8 intshi ububanzi.
I-EPM (Electronic Pick Module), kunye nee-linear motors kunye nee-direct-drive motors, ivumela indawo echanekileyo ye-XY.











