ASM MS90 tsarin rarrabawa ne mai cikakken sarrafa kansa wanda aka yi da taswirar wafer, wanda aka tsara musamman don rarrabawa da kuma zaban na'urorin semiconductor. Yana da hannu mai ɗaukar kai biyu wanda injinan layi ke tuƙawa, yana tallafawa na'urorin daga murabba'i 0.15 mm zuwa 5 mm, yana ba da daidaiton matsayi na XY na ±38 µm, kuma yana iya sarrafa na'urorin har zuwa inci 8 a diamita.
EPM (Module na Pick na Lantarki), tare da injinan layi da injinan tuƙi kai tsaye, yana ba da damar daidaita matsayin XY daidai.
