ASM MS90 ni sisitemu yo gutondekanya die ikoresha wafer-map, yagenewe cyane cyane gushyira mu byiciro no gutoranya die za semiconductor. Ifite ukuboko gufite imitwe ibiri gutwarwa na moteri zigororotse, ishyigikira die kuva kuri 0.15 mm kugeza kuri 5 mm kare, itanga uburyo bwo gushyira XY neza bwa ±38 µm, kandi ishobora gutunganya wafers ifite umurambararo wa santimetero 20.
EPM (Electronic Pick Module), hamwe na moteri zigororotse na moteri ziyobora direct-drive, ituma XY ishyirwa neza.
